Fluotech (Xiamen) New Materials Co., Ltd. Fluotech (Xiamen) New Materials Co., Ltd.
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Semiconductor
Semiconductor

Rubber Compound Solutions

Rubber and elastomer materials for the semiconductor industry

We specialize in providing high-performance rubber and elastomer materials tailored for the semiconductor industry. Our rubber compound solutions are designed to meet the rigorous demands of semiconductor manufacturing, ensuring reliability and precision in critical applications. Fluoroelastomer and perfluoroelastomer sealing materials are widely used in various areas to enhance durability, chemical resistance, and performance in demanding environments:

  • Perfluoroelastomer (FFKM) sealing materials are widely used in the semiconductor industry, particularly in plasma processing, chemical vapor deposition (CVD), and thermal or wet processing. These materials are essential for etching, HDPCVD (high-density plasma CVD), PECVD (plasma-enhanced CVD), LPCVD (low-pressure CVD), and RTP (rapid thermal processing), where maintaining a stable environment is critical.
  • FFKM O-rings and sealing components provide excellent resistance to fluorinated and chlorinated gases, ensuring long-term durability under extreme conditions. Withstanding temperatures of 300°C or higher and maintaining performance in ultra-high vacuum environments (10⁻⁹ Pa), these seals help maintain process integrity in endpoint windows, bell jar seals, and other critical areas of semiconductor manufacturing.
  • Chamber seals are used in stabilizing temperature, pressure, and humidity inside processing chambers. By preventing contamination and maintaining environmental consistency, these seals contribute to precision and quality control in semiconductor chip fabrication. Fluoroelastomer and perfluoroelastomer materials provide the reliability needed for these demanding applications.
Recommended Rubber Compounds for Semiconductor
FFKM O-Ring
FFKM O-Ring

Specialty rubber compounding solutions in chemically aggressive and high-temperature environments demand materials that can handle prolonged exposure without degradation. FFKM O-rings are engineered for exactly that, offering outstanding chemical resistance where standard fluoroelastomers fall short. Unlike conventional elastomers, which break down when exposed to ethers, amines, ketones, oxidizers, fuels, acids, and bases, FFKM retains its sealing integrity and mechanical stability, ensuring long-term performance in critical applications.

Applications in the semiconductor industry
Product Samples
Slit valves / Gate valves
Product Samples
Slit valves / Gate valves
Product Samples
Slit valves / Gate valves
Product Samples
Slit valves / Gate valves
How can we help you?
  • Email: ada@fluotechrubber.com
  • Tel.: +86-592-7213752
Contact us

Market Solutions

Explore solutions for Industrial Applications

We provide specialty rubber solutions for a wide range of industries, including automotive, semiconductor manufacturing, oil and gas, aerospace, and wearable technology. Each sector presents unique challenges, from high-temperature resistance and chemical exposure to precision sealing and mechanical durability.

Explore All Applications
Smart Wearables
Rubber Compound Solutions Smart Wearables
Semi-Conductor
Rubber Compound Solutions Semiconductor
Aerospace
Rubber Compound Solutions Aerospace
Automotive
Rubber Compound Solutions Automotive
Petrochemical
Rubber Compound Solutions Petrochemical
Fluotech (Xiamen) New Materials Co., Ltd. Your trusted partner in special rubber compounds for aerospace, automotive, and other high-performance applications
ada@fluotechrubber.com
+86-592-7213752
+86-13753601944
Products
  • Hydrogenated Nitrile Rubber (HNBR)
  • Fluoroelastomer (FKM)
  • Fluorosilicone Rubber (FVMQ)
  • Perfluoroelastomer (FFKM)
  • Phenyl Silicone (PVMQ)
  • Fluorine Rubber Vulcanization Accelerator
  • Perfluorinated Polyether Oil (PFPE Oil)
Applications
By Industries
  • Automotive
  • Semiconductor
  • Petrochemical
  • Aerospace
  • Smart Wearables
By Function
  • Low Temperature Resistant
  • High Temperature Resistant
  • Chemical Resistant
  • Oil & Corrosion Resistant